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ProblemsPart Replacement Time
Corrosion Resistance -
Proposed EffectMan-Hour Reduction
Cost Reduction
Improved Productivity -
Product TypeAlumina Cover
Customer's concerns and problems / Before
Our proposals and improvement effects / After
Therefore, the Ceramics Design Lab suggested that when the customer cleaned the inner wall of the chamber of CVD equipment, the customer should attach a protective covering made of alumina-based material to the heater components.
As a result, we were able to prevent the heater from becoming contaminated with cleaning gas, so that the heater components were better held and the frequency of replacement of the heater components was greatly reduced.
Point of the proposed example / Point
The point of this case is that the protective cover of alumina is attached to parts that have been replaced frequently, thereby extending the life of the parts and reducing the number of man-hours for replacement.
Alumina, one of the ceramics materials, has much better corrosion and chemical resistance than metal materials, and has better resistance to high temperatures.
Therefore, the life of the protective cover itself is also long.
The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.
We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.
Consult with us when considering replacing existing metal and plastic products with ceramics products that have superior corrosion resistance, chemical resistance, and high temperature resistance.
Integrated response from processing to development of ceramic materials !
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A customer, a semiconductor device manufacturer, asked us, “The frequency of replacement of heater parts for CVD equipment contaminated with cleaning gas is too frequent and time-consuming, so is there any way to reduce the frequency of replacement?”