For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck
made in Japan
＜Telephone quotations/inquiries＞
TEL+81-26-248-1626
Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)
＜Telephone quotations/inquiries＞
TEL. +81-26-248-1626Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
＜Estimates and inquiries by FAX＞
FAX. +81-26-251-2160
DRAWING DOWNLOAD
You can download 2D and 3D drawing files of wafer transfer hands in dwg format or STEP format (multiple selections are possible).
We hope you find it useful.
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LeviZac12-inch
（LeviZac12-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
LeviZac8-inch
（LeviZac8-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
I Type LeviZac4-inch
（I Type LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
8 guides allow wafer retention
-
Thin-LeviZac4-inch
（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
Thin-LeviZac4-inch
（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
Thin-LeviZac4-inch
（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Can be transported to narrow cassette widths
-
PeriZac12-inch
（PeriZac12-inch）
- Particle suppression
- Improved durability
- Adsorption type
- Deflection
- Metal-free
- For Atmospheric
- Thinner
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
PeriZac8-inch
（PeriZac8-inch）
- Particle suppression
- Improved durability
- Adsorption type
- Deflection
- Metal-free
- For Atmospheric
- Thinner
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
-
UniZac-air12-inch
（UniZac-air12-inch）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
Effective for organic-based outgas control
-
UniZac-air8-inch
（UniZac-air8-inch）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
Effective for organic-based outgas control
-
UniZac-air8-inch(1mm thickness type)
（UniZac-air8-inch(1mm thickness type)）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
1 mm thick cavity integrated transfer End Effector
-
UniZac-Obon12-inch
（UniZac-Obon12-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness
-
UniZac-Obon8-inch
（UniZac-Obon8-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness
-
UniZac-Obon4-inch
（UniZac-Obon4-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness
-
Porous embedded hand12-inch
（Porous embedded hand12-inch）
- Warped wafer
- Thin wafer
- Deformation prevention
- Adsorption scar suppression
- Adsorption type
- Porousbuilt-in
- For Atmospheric
- Breathability
- Responsiveness
Capable of retaining lightly warped wafers
-
Porous embedded hand8-inch
（Porous embedded hand8-inch）
- Warped wafer
- Thin wafer
- Deformation prevention
- Adsorption scar suppression
- Adsorption type
- Porousbuilt-in
- For Atmospheric
- Breathability
- Responsiveness
Capable of retaining lightly warped wafers
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CONTACT
The quotation and inquiries are available by the telephone /FAX or the mail .
TEL. +81-26-248-1626
FAX. +81-26-251-2160
