Porous chuck

Porous ceramics suction chucks that can adsorb ultra-thin wafers and films without damage

CERAMICS DESIGN LAB > Porous chuck

Are there any problems like this?

Porous chuck|Ceramics Design Lab
  • We want to adsorb films, wafers, paper, skins, and parts, but do not know what type of porous material to choose...

  • I want to consider porous material as a filtering filter, gas filter, or water purification catalyst...

  • We are looking for a setter with high degreasability and good breathability...

Let us help you !

Integrated support from developing not only Alumina and SiC but also porous ceramics and special ceramics with excellent heat resistance and electrical conductivity!

We have a proven track record of production of various industries, applications, and shapes such as wafer transfer End Effector / Handling Arm, vacuum chucks, large boards, and firing setters!

We offer proposals for VA / VE to customers that are possible only because they are familiar with the characteristics of ceramic materials and the problems unique to the semiconductors and electronics industries!

If you are in a hurry, please call us!

TEL+81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

This site "Ceramics Design Lab" is operated by the Fine Ceramics Division.
ASUZAC Corporation is a group founded in 1946 and
consisting of more than 800 people.

Characteristics of our "Porous chuck"

  • Porous chuck|Ceramics Design Lab

    Porous ceramics suction chuck that can adsorb ultra-thin wafers and films without dents or damage

    The porous chuck can pick up and transfer warped or deformed workpieces, and its microporous design makes it difficult to leave pickup marks on the workpiece. In the past, thin workpieces were adsorbed by opening microholes, but the slight irregularity caused damage to the workpiece, resulting in defects.

    However, with a porous chuck, distortion and scratches can be greatly reduced, leading to improved wafer and film yields.

    In addition, the chuck is capable of double-sided suction, and its high responsiveness leads to improved workability.

Examples and Achievements of our "Porous chuck"

Let us help you !

Integrated support from developing not only Alumina and SiC but also porous ceramics and special ceramics with excellent heat resistance and electrical conductivity!

We have a proven track record of production of various industries, applications, and shapes such as wafer transfer End Effector / Handling Arm, vacuum chucks, large boards, and firing setters!

We offer proposals for VA / VE to customers that are possible only because they are familiar with the characteristics of ceramic materials and the problems unique to the semiconductors and electronics industries!

If you are in a hurry, please call us!

TEL+81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

Frequently Asked Questions on "Porous chuck"

  • The demonstration machine for the Porous Chucks are available for rental. We have a lineup of products available for rent, please see the link below for details. Please contact us for a proposal based on your intended use.


    >>Applications for a demonstration machine for the Porous Chuck are shown here.

  • Although the production size varies depending on the material, the largest production results are AZP60 and porous size 500×500×10 mm.

Four Reasons Why Ceramics Design Lab is Chosen

  • Integrated support from material development to design and manufacturing of ceramics

    Integrated support from material development to design and manufacturing of ceramics

    We produce a wide variety of fine ceramics products such as Alumina, silicon carbide (SiC), Zirconia, Porous ceramics, etc.We are familiar with the types and characteristics of fine ceramics materials, as well as the usage environment and applications of products used in semiconductors, electronic components, and other fields, enabling us to make optimal material proposals.Our in-house facilities and equipment for mixing and granulating raw materials, as well as for forming materials, enable us to develop special materials such as insulating ceramics, conductive ceramics, low-reflective Black Alumina, and high-purity ceramics, so that we are able to contribute to the solution of our customers’ issues.
  • Extensive delivery record for semiconductor foundries, electronic device manufacturers, and equipment manufacturers

    Extensive delivery record for semiconductor foundries, electronic device manufacturers, and equipment manufacturers

    We have delivered ceramics products to domestic and overseas semiconductor foundries, electronic device manufacturers, and equipment manufacturers for many years.We have a proven track record in the design and manufacture of ceramic products of various shapes, applications, and materials, such as transfer End Effector / Handling Arm and suction chucks for thin work pieces such as silicon wafers and films, as well as shield parts for wafer trays, printed circuit boards, and vacuum chambers.
  • Expertise in VA / VE proposals backed by over 40 years of history

    Expertise in VA / VE proposals backed by over 40 years of history

    In the manufacturing and transport processes of semiconductors and electronic components, these problems can occur
    ・Particle generation
    ・Reduction of yield due to contamination
    ・Wafer surface damage due to misalignment
    ・Outgas (outgassing)

    We are well aware of these industry-specific problems and the reasons behind them, and is actively proposing VA・VE techniques to solve each customer’s problem.
    We can respond to customer needs by reducing costs, shortening lead times, reducing man-hours for parts replacement, and improving the functionality of the transport End Effector and Handling Arm.
  • Consignment services from prototyping to mass production of one-off products

    Consignment services from prototyping to mass production of one-off products

    We specialize in small-lot, high-mix production, and can flexibly handle everything from trial production of single and small lots to mass production of medium lots of up to about 100 pieces.

    During prototyping, we make material and design proposals that take into account the product application and operating environment according to the customer’s requirements. We evaluate mass production feasibility such as cost, lead time, and accuracy variation before moving to mass production, so there is no rework.

Operating company information

Company Name ASUZAC CORPORATION
Division name Fine Ceramics Division
Division established October, 1981
Address Headquarters: 981 Oaza Nakayama, Takayama-mura, Kamitakai-gun, Nagano 382-8508, Japan
factory Takayama factory
Sales Offices Headquarters, Tokyo, Osaka and Kyushu
TEL +81-26-248-1626
FAX +81-26-251-2160
Mail fcerainf@asuzac.co.jp
Description of Businesses Development, production, processing, and sales of ceramics

CONTACT

The quotation and inquiries are available by the telephone /FAX or the mail .