Robot Test Center


What is the Robot Test Center?

  • Inside the robot test center
    The Ceramics Design Laboratory has in-house Robot Test Center, a verification facility for the wafer transfer process, enabling the testing of custom-made transfer End Effector / Handling Arm.
    We can confirm the positional accuracy, repeatability, durability, etc. of the transfer End Effector / Handling Arm and support the user’s custom-made transfer hand manufacture and procurement.
  • Inside the robot test center

    The Robot Test Center can perform the following tests.

    ◆To check the conveyance speed

    ◆Checking vibration during transportation

    ◆Particle measurement of wafer after transfer

    ◆Misalignment of the wafer according to the number of transfers Measurement of (repetition system)

    ◆Checking the Scratch on the Back Side of the Wafer

    ◆Measuring the surface roughness of PAD of the wafer retaining portion

The value that the Robot Test Center offers to customers

woman in trouble
  • I want to test the performance of a transfer End Effector / Handling Arm under different conditions before putting it on the line…

  • When the wafers were actually transferred by the transfer End Effector / Handling Arm, unintentional scratches were found…

  • The misalignment gradually increased after repeated transportation…

At the Robot Test Center, we can actually transfer wafers with custom-made End Effector / Handling Arm for testing and evaluation, thus avoiding any modification or remanufacturing after delivery or after the start of operation!

for design developers List of VA/VE proposal examples

  • Search by Problem
  • Search by Desired Effect
  • Search by Product Type
  • Deformation
  • Cost
  • Particles
  • Conductivity
  • Suction Marks
  • Static Electricity
  • Warped Wafer
  • Productivity (Throughput)
  • Impurities
  • Sparking
  • Wafer Scratching
  • Part Replacement Time
  • Outgassing
  • Surface Resistance
  • Wafer Sticking
  • Reflectance
  • Air-Permeability
  • Lint adhesion
  • Misalignment
  • Clogging
  • Plasma Resistance
  • Yield
  • Contact Damage
  • Product Life
  • Dust Emissions
  • Defect Rate
  • Heat Resistance
  • Contamination
  • Abrasion
  • Functionality
  • Chemical Resistance
  • Corrosion Resistance
  • 薄ウェハ

Part Replacement Time


  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
  • Sparking Prevention
  • Improved Chemical Resistance
  • Improved Productivity
  • Misalignment Prevention
  • Reduced Defect Rate
  • Improved Productivity(Improved Throughput)
  • Wear Resistance
  • Contact Damage Reduction
  • Yield Improvement
  • Man-Hour Reduction
  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm

From material selection and design to manufacturing, inspection and testing, For any problems related to custom-made wafer transfer hands We are a one-stop shop!

image of robot test center
image of robot test center

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)


The quotation and inquiries are available by the telephone /FAX or the mail .