Example of VA / VE proposals

CERAMICS DESIGN LAB > Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm

Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm

  • Problems
    Productivity (Throughput)
    Part Replacement Time
  • Proposed Effect
    Improved Productivity(Improved Throughput)
    Improved Functionality
  • Product Type
    Wafer Transfer End Effector / Handling Arm

Customer's concerns and problems / Before

A production engineer from a semiconductor equipment manufacturer asked us, “In the etching process, it is time-consuming to open the chamber every time to check the wear rate of the edge ring. We are looking for a good suggestion.”

Our proposals and improvement effects / After

In response, the Ceramics Design Laboratory proposed assembling sensors at the tip of the wafer Transfer End Effector / Handling Arm.


As a result, workers were able to check the consumable rate without opening the chamber, thus realizing improved productivity (improved throughput).

  • Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm|Ceramics Design Lab
  • Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm|Ceramics Design Lab

Point of the proposed example / Point

The point of this case is that the assembly of the sensor to the wafer Transfer End Effector / Handling Arm reduces the man-hours required for the replacement and maintenance of the edge ring.


The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from the development and preparation of materials for ceramics to design and manufacture, as well as surface treatment, inspection, and cleaning.


We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.


We also offer suggestions for reducing man-hours and improving productivity in semiconductor manufacturing processes, so please feel free to contact us.

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

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Examples of VA/VE proposals
for designers and developers

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  • Deformation
  • Cost
  • Particles
  • Conductivity
  • Suction Marks
  • Static Electricity
  • 大型偏光フィルムの吸着
  • Warped Wafer
  • Productivity (Throughput)
  • Impurities
  • Sparking
  • Wafer Scratching
  • Part Replacement Time
  • Outgassing
  • Surface Resistance
  • Wafer Sticking
  • Reflectance
  • Air-Permeability
  • Lint adhesion
  • Misalignment
  • Clogging
  • Plasma Resistance
  • Yield
  • Contact Damage
  • Product Life
  • Dust Emissions
  • Defect Rate
  • Heat Resistance
  • Contamination
  • Abrasion
  • Functionality
  • Chemical Resistance
  • Corrosion Resistance
  • 薄ウェハ

Part Replacement Time

薄ウェハ

  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
  • Sparking Prevention
  • Improved Chemical Resistance
  • Improved Productivity
  • Misalignment Prevention
  • Reduced Defect Rate
  • Improved Productivity(Improved Throughput)
  • Wear Resistance
  • Contact Damage Reduction
  • Yield Improvement
  • Man-Hour Reduction
  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • ワークの傷防止
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Improved Productivity(Improved Throughput)

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm

CONTACT

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