Original Product
Original product designed and developed by our company
For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck
made in Japan
<Telephone quotations/inquiries>
TEL+81-26-248-1626
Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)
Original product designed and developed by our company
I am considering a transfer hand, but I do not know what kind of hand to select...
I want to check the positional accuracy, repeatability, and durability of the transfer hand...
We would like you to propose porous chucks and hand shapes...
NEW! LeviZac®(薄型)浮上式標準ハンド(ベルヌーイ方式)
Classification: 浮上式標準ハンド(ベルヌーイ方式)
Use: ウエハ搬送用(大気用)
Material: 高純度アルミナ
Feature:
薄型のため、狭いカセットピッチへの搬送が可能
4~8インチの薄反りウエハの搬送が可能
8箇所のガイドでウエハの保持が可能
NEW! UniZac-Pair 8-inch Porous embedded hand with sensor groove
Classification: Porous embedded End Effector
Use: For wafer transport (atmospheric use)
Material: Adsorption part:Porous ceramics,Body:Alumina and SiC(Silicon Carbide)
Feature:
・Grooved for sensor mounting
・Thin warped wafers can be adsorbed
・Hard to adhere adsorption marks on wafers
NEW! 両面吸着多孔質チャック
Classification: 多孔質チャック
Use: 吸着
Material: 多孔質セラミックス,アルシーマ
Feature:
両面同時に吸着が可能
バックアップ用
固定用治具として利用可能
多孔質セラミックスAZPV60
Classification: 多孔質セラミックス
Use: セッターフィルター吸着
Material: 多孔質セラミックス
Feature:
通気率向上
ワーク変形の防止
高い応答性
UniZac-Obon® (ユニザックオボン) トレイ式標準ハンド
Classification: トレイ式標準ハンド
Use: ウエハ搬送(大気用・真空用)
Material: 高純度アルミナ,炭化ケイ素,コルシード
Feature:
高耐熱性
高強度
薄型化
LeviZac® Floating standard End Effector (Bernoulli method)
Classification: Floating standard End Effector (Bernoulli method)
Use: For wafer transport (atmospheric use)
Material: 高純度アルミナ
Feature:
Capable of handling warped wafers
Capable of handling thin wafers
Achieves non-contact except for the outer guide
PeriZac® (ペリザック)外周3mm吸着式標準ハンド
Classification: 外周3mm吸着式標準ハンド
Use: ウエハ搬送用(大気用)
Material: 高純度アルミナ
Feature:
ウエハ外周3mm以内での吸着が可能
ワークにダメージを与えにくい材質のガイドを使用
薄型化が可能
UniZac-air® (ユニザックエア) 吸着ハンド
Classification: 吸着ハンド
Use: ウエハ搬送用(大気用)
Material: 高純度アルミナ
Feature:
耐久性向上
高耐熱性
接着剤不使用
Porous embedded End Effector / Handling Arm
Classification: Adsorption End Effector / Handling Arm
Use: For wafer transport (atmospheric use)
Material: Adsorption part:Porous ceramics,Body:Alumina and SiC(Silicon Carbide)
Feature:
Transfer of thin warped wafers is possible.
Hard to adsorb traces on wafers.
PeriZac® Peripherally Gripping End Effector / Handling Arm
Classification: Outer circumference 3mm adsorption type standard End Effector
Use: For wafer transport (atmospheric use)
Material: High Purity Alumina
Feature:
Capable of suction within 3mm of wafer circumference
Use of a material that does not damage the workpiece
Use of a guide made of a material that is resistant to damage to the workpiece
Enables thinner wafers
Frequently Asked Questions
Common questions from
the Ceramics Design Lab
Available Material / Size / Product
Please see our wide range of
services
Equipment owned
Our processing and
inspection facilities
Company profile
Ceramics Design Lab is
operated by Asuzac Co., Ltd.
The quotation and inquiries are available by the telephone /FAX or the mail .
FAX. +81-26-251-2160