Example of VA / VE proposals

CERAMICS DESIGN LAB > Proposal of specially treated products that can prevent metal contamination

Proposal of specially treated products that can prevent metal contamination

  • Problems
    Dust Emissions
    Chemical Resistance
    Product Life
  • Proposed Effect
    Improved Chemical Resistance
    Improved Productivity(Improved Throughput)
    Man-Hour Reduction
    Long Service Life
    Metal Contamination Control
    Particle Control
  • Product Type

Customer's concerns and problems / Before

Customers of semiconductor manufacturing equipment manufacturers asked us to develop ceramics materials by saying that we would like to change existing resin parts to materials with high heat resistance and chemical resistance.

Our proposals and improvement effects / After

In response, the Ceramics Design Laboratory replaced plastic components with SiC (silicon carbide).

This has resulted in improved heat and chemical resistance, leading to longer service life.

In addition, special treatment of SiC has enabled us to deal with metal contamination and particles, both of which have been a challenge in previous SiC.

  • Proposal of specially treated products that can prevent metal contamination|Ceramics Design Lab

Point of the proposed example / Point

The point of this case is that the material change from resin to ceramics ensures the necessary heat resistance and chemical resistance.

In addition, metal contamination may become an issue with SiC, but defective parts can be reduced because measures are taken by special surface-treatment.

The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.

We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.

If you are considering changing materials from resin or metal to ceramics, or if you are having trouble with the heat resistance and strength of resin or the chemical resistance and corrosion resistance of metal, please feel free to contact us.

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

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Examples of VA/VE proposals
for designers and developers

  • Search by Problem
  • Search by Desired Effect
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  • Deformation
  • Cost
  • Particles
  • Conductivity
  • Suction Marks
  • Static Electricity
  • Warped Wafer
  • Productivity (Throughput)
  • Impurities
  • Sparking
  • Wafer Scratching
  • Part Replacement Time
  • Outgassing
  • Surface Resistance
  • Wafer Sticking
  • Reflectance
  • Air-Permeability
  • Lint adhesion
  • Misalignment
  • Clogging
  • Plasma Resistance
  • Yield
  • Contact Damage
  • Product Life
  • Dust Emissions
  • Defect Rate
  • Heat Resistance
  • Contamination
  • Abrasion
  • Functionality
  • Chemical Resistance
  • Corrosion Resistance
  • 薄ウェハ

Part Replacement Time


  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
  • Sparking Prevention
  • Improved Chemical Resistance
  • Improved Productivity
  • Misalignment Prevention
  • Reduced Defect Rate
  • Improved Productivity(Improved Throughput)
  • Wear Resistance
  • Contact Damage Reduction
  • Yield Improvement
  • Man-Hour Reduction
  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm


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