Example of VA / VE proposals

CERAMICS DESIGN LAB > Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment

Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment

  • Problems
    Part Replacement Time
    Corrosion Resistance
  • Proposed Effect
    Man-Hour Reduction
    Cost Reduction
    Improved Productivity
  • Product Type
    Alumina Cover

Customer's concerns and problems / Before

A customer, a semiconductor device manufacturer, asked us, “The frequency of replacement of heater parts for CVD equipment contaminated with cleaning gas is too frequent and time-consuming, so is there any way to reduce the frequency of replacement?”

  • Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment|Ceramics Design Lab

Our proposals and improvement effects / After

Therefore, the Ceramics Design Lab suggested that when the customer cleaned the inner wall of the chamber of CVD equipment, the customer should attach a protective covering made of alumina-based material to the heater components.


As a result, we were able to prevent the heater from becoming contaminated with cleaning gas, so that the heater components were better held and the frequency of replacement of the heater components was greatly reduced.

  • Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment|Ceramics Design Lab
  • Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment|Ceramics Design Lab

Point of the proposed example / Point

The point of this case is that the protective cover of alumina is attached to parts that have been replaced frequently, thereby extending the life of the parts and reducing the number of man-hours for replacement.


Alumina, one of the ceramics materials, has much better corrosion and chemical resistance than metal materials, and has better resistance to high temperatures.


Therefore, the life of the protective cover itself is also long.


The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.


We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.


Consult with us when considering replacing existing metal and plastic products with ceramics products that have superior corrosion resistance, chemical resistance, and high temperature resistance.

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  • 薄ウェハ

Part Replacement Time

薄ウェハ

  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
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  • Wear Resistance
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  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • ワークの傷防止
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Improved Productivity(Improved Throughput)

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm

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