Example of VA / VE proposals

CERAMICS DESIGN LAB > Proposal of double-sided suction Porous Chuck

Proposal of double-sided suction Porous Chuck

  • Problems
    Part Replacement Time
  • Proposed Effect
    Improved Productivity(Improved Throughput)
    Man-Hour Reduction
    Cost Reduction
    Improved Functionality
  • Product Type
    Porous Chuck

Customer's concerns and problems / Before

We received a consultation from the customer to ask whether there is one Porous Chuck fitted with a porous material for backup.

Porous Chucks currently in use were cleaned or replaced when they became clogged, which was time-consuming and costly.

Our proposals and improvement effects / After

We have proposed a Porous Chuck that has a AZP60 porous surface and a AZPS40 porous back surface, and that can be used on both the front and back surfaces.

As a result of our use by our customers, we received an appreciation that the back side can also be used when the porous material on one side becomes clogged.

The time required to replace the chuck has been reduced to one-half of the previous level, leading to improvements in productivity.

  • Proposal of double-sided suction Porous Chuck|Ceramics Design Lab
  • Proposal of double-sided suction Porous Chuck|Ceramics Design Lab
  • Proposal of double-sided suction Porous Chuck|Ceramics Design Lab
  • Proposal of double-sided suction Porous Chuck|Ceramics Design Lab

Point of the proposed example / Point

By convention, the suction surface of Porous Chuck is only one side, but the product can actually be manufactured with a specification that allows both sides to be sucked.

By enabling adsorption on both sides, flexible measures can be taken, such as reducing the frequency of maintenance and expanding the scope of transportation.

The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.

We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramic materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.

If you have any problems with your existing Porous Chuck, please feel free to contact us!

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

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Examples of VA/VE proposals
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  • Deformation
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  • Particles
  • Conductivity
  • Suction Marks
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Part Replacement Time


  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
  • Sparking Prevention
  • Improved Chemical Resistance
  • Improved Productivity
  • Misalignment Prevention
  • Reduced Defect Rate
  • Improved Productivity(Improved Throughput)
  • Wear Resistance
  • Contact Damage Reduction
  • Yield Improvement
  • Man-Hour Reduction
  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm


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