For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck
made in Japan
＜Telephone quotations/inquiries＞
TEL+81-26-248-1626
Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)
＜Telephone quotations/inquiries＞
TEL. +81-26-248-1626Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
＜Estimates and inquiries by FAX＞
FAX. +81-26-251-2160
What is the Robot Test Center?
-
The Ceramics Design Laboratory has in-house Robot Test Center, a verification facility for the wafer transfer process, enabling the testing of custom-made transfer End Effector / Handling Arm.
We can confirm the positional accuracy, repeatability, durability, etc. of the transfer End Effector / Handling Arm and support the user’s custom-made transfer hand manufacture and procurement. -
The Robot Test Center can perform the following tests.
◆To check the conveyance speed
◆Checking vibration during transportation
◆Particle measurement of wafer after transfer
◆Misalignment of the wafer according to the number of transfers Measurement of (repetition system)
◆Checking the Scratch on the Back Side of the Wafer
◆Measuring the surface roughness of PAD of the wafer retaining portion
The value that the Robot Test Center offers to customers
I want to test the performance of a transfer End Effector / Handling Arm under different conditions before putting it on the line…
When the wafers were actually transferred by the transfer End Effector / Handling Arm, unintentional scratches were found…
The misalignment gradually increased after repeated transportation…
At the Robot Test Center, we can actually transfer wafers with custom-made End Effector / Handling Arm for testing and evaluation, thus avoiding any modification or remanufacturing after delivery or after the start of operation!
for design developers List of VA/VE proposal examples
- Search by Problem
- Search by Desired Effect
- Search by Product Type
- Deformation
- Cost
- Particles
- Conductivity
- Suction Marks
- Static Electricity
- 大型偏光フィルムの吸着
- Warped Wafer
- Productivity (Throughput)
- Impurities
- Sparking
- Wafer Scratching
- Part Replacement Time
- Outgassing
- Surface Resistance
- Wafer Sticking
- Reflectance
- Air-Permeability
- Lint adhesion
- Misalignment
- Clogging
- Plasma Resistance
- Yield
- Contact Damage
- Product Life
- Dust Emissions
- Defect Rate
- Heat Resistance
- Contamination
- Abrasion
- Functionality
- Chemical Resistance
- Corrosion Resistance
- 薄ウェハ
Cost
-
2022.12.05Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
-
2022.12.05Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Particles
-
2022.12.05Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Conductivity
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Suction Marks
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
-
2024.06.10大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Static Electricity
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
-
2022.12.05Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Warped Wafer
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2023.03.07Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved Functionality
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Warped Wafer PreventionImproved Productivity(Improved Throughput)
Productivity (Throughput)
-
2022.12.05
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Productivity(Improved Throughput)Improved Functionality
-
2022.12.05Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Wafer Scratching
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
Part Replacement Time
-
2022.12.05Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type： Alumina Cover
Proposed Effect： Man-Hour ReductionCost ReductionImproved Productivity
-
2022.12.05
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Productivity(Improved Throughput)Improved Functionality
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Wafer Sticking
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
Air-Permeability
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
Misalignment
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Plasma Resistance
Yield
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2024.06.10
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Contact Damage
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Product Life
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Dust Emissions
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Heat Resistance
-
2022.12.05
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
-
2022.12.05Material change to Black Alumina pin
Product Type： Other
Proposed Effect： Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Abrasion
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Functionality
-
2022.12.05Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityPortability
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
薄ウェハ
- 準備中です
- Metal Contamination Control
- Wear Resistance Improvement
- Improved Functionality
- Wafer Scratch Prevention
- Anti-Static Measures
- Improved Heat Resistance
- Portability
- Warped Wafer Prevention
- Sparking Prevention
- Improved Chemical Resistance
- Improved Productivity
- Misalignment Prevention
- Reduced Defect Rate
- Improved Productivity(Improved Throughput)
- Wear Resistance
- Contact Damage Reduction
- Yield Improvement
- Man-Hour Reduction
- Surface Resistance Control
- Wear Prevention
- Particle Control
- Suction Mark Reduction
- Outgassing Reduction
- Deformation Reduction
- Improved Plasma Resistance
- Long Service Life
- ワークの傷防止
- Contamination Measures
- Cost Reduction
Wear Resistance Improvement
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Material change to Black Alumina pin
Product Type： Other
Proposed Effect： Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Improved Functionality
-
2023.03.07
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved Functionality
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityPortability
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2022.12.05
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Productivity(Improved Throughput)Improved Functionality
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Wafer Scratch Prevention
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
Anti-Static Measures
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
-
2022.12.05
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Improved Heat Resistance
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
-
2022.12.05
Material change to Black Alumina pin
Product Type： Other
Proposed Effect： Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Warped Wafer Prevention
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2023.03.07
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved Functionality
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Warped Wafer PreventionImproved Productivity(Improved Throughput)
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Improved Productivity
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type： Alumina Cover
Proposed Effect： Man-Hour ReductionCost ReductionImproved Productivity
Misalignment Prevention
-
2023.03.07
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved Functionality
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Reduced Defect Rate
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2022.12.05
Proposal for ceramicization of masks
Product Type： Other
Proposed Effect： Deformation ReductionCost ReductionReduced Defect Rate
-
2022.12.05
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Improved Productivity(Improved Throughput)
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Productivity(Improved Throughput)Improved Functionality
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Warped Wafer PreventionImproved Productivity(Improved Throughput)
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
-
2024.06.10
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Contact Damage Reduction
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Yield Improvement
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type： Baking Setter
Proposed Effect： Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Man-Hour Reduction
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type： Alumina Cover
Proposed Effect： Man-Hour ReductionCost ReductionImproved Productivity
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Surface Resistance Control
-
2022.12.05
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Particle Control
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Suction Mark Reduction
-
2022.12.05
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
-
2023.08.08
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wafer Scratch PreventionSuction Mark Reduction
-
2024.06.10
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Outgassing Reduction
-
2022.12.05
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Deformation Reduction
-
2022.12.05
Proposal for ceramicization of masks
Product Type： Other
Proposed Effect： Deformation ReductionCost ReductionReduced Defect Rate
-
2024.06.10
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Improved Plasma Resistance
Long Service Life
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Contamination Measures
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2022.12.05
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Cost Reduction
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type： Alumina Cover
Proposed Effect： Man-Hour ReductionCost ReductionImproved Productivity
-
2022.12.05
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
-
2022.12.05
Proposal for ceramicization of masks
Product Type： Other
Proposed Effect： Deformation ReductionCost ReductionReduced Defect Rate
-
2022.12.05
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
- Wafer Transfer End Effector / Handling Arm
- Baking Setter
- Porous Chuck
- Alumina Cover
- PAD
- Other
Wafer Transfer End Effector / Handling Arm
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Contact Damage ReductionWear PreventionContamination Measures
-
2023.03.07
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved Functionality
-
2022.12.05
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
-
2022.12.05
Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityPortability
-
2022.12.05
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
-
2022.12.05
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type： Wafer Transfer End Effector / Handling Arm
Proposed Effect： Improved Productivity(Improved Throughput)Improved Functionality
Porous Chuck
-
2022.12.05
Proposal of double-sided suction Porous Chuck
Product Type： Porous Chuck
Proposed Effect： Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
-
2024.06.10
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type： Porous Chuck
Proposed Effect： Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
PAD
-
2022.12.05
Proposing PAD to prevent static electricity
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
-
2022.12.05
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
-
2022.12.05
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Warped Wafer PreventionImproved Productivity(Improved Throughput)
-
2022.12.05
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type： Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect： Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Other
-
2022.12.05
Proposal of specially treated products that can prevent metal contamination
Product Type： Other
Proposed Effect： Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
-
2022.12.05
Proposal for ceramicization of masks
Product Type： Other
Proposed Effect： Deformation ReductionCost ReductionReduced Defect Rate
-
2022.12.05
Material change to Black Alumina pin
Product Type： Other
Proposed Effect： Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
From material selection and design to manufacturing, inspection and testing, For any problems related to custom-made wafer transfer hands We are a one-stop shop!
Integrated response from processing to development of ceramic materials !
Please feel free to contact us !
TEL +81-26-248-1626
Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
-
-
-
Searching for problems
- Deformation
- Cost
- Particles
- Conductivity
- Suction Marks
- Static Electricity
- 大型偏光フィルムの吸着
- Warped Wafer
- Productivity (Throughput)
- Impurities
- Sparking
- Wafer Scratching
- Part Replacement Time
- Outgassing
- Surface Resistance
- Wafer Sticking
- Reflectance
- Air-Permeability
- Lint adhesion
- Misalignment
- Clogging
- Plasma Resistance
- Yield
- Contact Damage
- Product Life
- Dust Emissions
- Defect Rate
- Heat Resistance
- Contamination
- Abrasion
- Functionality
- Chemical Resistance
- Corrosion Resistance
- 薄ウェハ
-
Look for the proposed effect
- Metal Contamination Control
- Wear Resistance Improvement
- Improved Functionality
- Wafer Scratch Prevention
- Anti-Static Measures
- Improved Heat Resistance
- Portability
- Warped Wafer Prevention
- Sparking Prevention
- Improved Chemical Resistance
- Improved Productivity
- Misalignment Prevention
- Reduced Defect Rate
- Improved Productivity(Improved Throughput)
- Wear Resistance
- Contact Damage Reduction
- Yield Improvement
- Man-Hour Reduction
- Surface Resistance Control
- Wear Prevention
- Particle Control
- Suction Mark Reduction
- Outgassing Reduction
- Deformation Reduction
- Improved Plasma Resistance
- Long Service Life
- ワークの傷防止
- Contamination Measures
- Cost Reduction
-
Search from the product type
-
EXAMPLE OF CUSTOM-MADE
-
PRODUCTS AND SERVICES
-
Latest technology column
-
CONTENT
CONTACT
The quotation and inquiries are available by the telephone /FAX or the mail .
TEL. +81-26-248-1626
FAX. +81-26-251-2160
