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ProblemsWarped Wafer
Conductivity
Static Electricity -
Proposed EffectWafer Scratch Prevention
Warped Wafer Prevention
Anti-Static Measures
Reduced Defect Rate -
Product TypeWafer Transfer End Effector / Handling ArmPAD
Customer's concerns and problems / Before
Our proposals and improvement effects / After
We suggested handing electrostatically diffused alumina (ADC membrane and ADB membrane) with a conductive PAD attached.
As a result, it became possible to take countermeasures against static electricity, leading to improved yield.
Point of the proposed example / Point
The point of this case is that anti-static measures prevent wafers from being worn or scratched and improve yields.
The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.
We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.
If you have trouble with the existing wafer Transfer End Effector / Handling Arm, please feel free to contact us.
Integrated response from processing to development of ceramic materials !
Please feel free to contact us !
Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
The customer asked us to take countermeasures against static electricity while absorbing PAD.