Example of VA / VE proposals

CERAMICS DESIGN LAB > Proposal of a porous setter with low impact on the work piece and good air permeability

Proposal of a porous setter with low impact on the work piece and good air permeability

  • Problems
    Air-Permeability
    Contact Damage
    Yield
  • Proposed Effect
    Contact Damage Reduction
    Improved Functionality
    Reduced Defect Rate
    Yield Improvement
  • Product Type
    Baking Setter

Customer's concerns and problems / Before

A customer of a semiconductor device manufacturer who uses sintering setters asked us, “Is there any material with good air permeability that would have less impact on the work piece and allow venting during heat treatment?”

Our proposals and improvement effects / After

In the Ceramics Design Laboratory, we proposed porous material AZP50 with small pore diameters and good air permeability.


As a result of evaluations by customers, we were able to confirm that the air permeability was improved during heat treatment and the effect on work pieces was suppressed.

  • Proposal of a porous setter with low impact on the work piece and good air permeability|Ceramics Design Lab
  • Proposal of a porous setter with low impact on the work piece and good air permeability|Ceramics Design Lab
  • Proposal of a porous setter with low impact on the work piece and good air permeability|Ceramics Design Lab

Point of the proposed example / Point

The point of this case is that the influence on the work could be reduced by selecting a porous material with good air permeability as the material for the setter for firing.


Degassing during heat treatment is very important to reduce residual stress.


The alumina-based porous ceramics AZP50, originally developed by the Ceramics Design Lab, is a material with 50% porosity and excellent air permeability.


We also offer a AZP60 that offers even higher air permeability and better suction power.


The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.


We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity alumina and SiC that are highly pure and prevent contamination.

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

Examples of VA/VE proposals
for designers and developers

  • Search by Problem
  • Search by Desired Effect
  • Search by Product Type
  • Deformation
  • Cost
  • Particles
  • Conductivity
  • Suction Marks
  • Static Electricity
  • 大型偏光フィルムの吸着
  • Warped Wafer
  • Productivity (Throughput)
  • Impurities
  • Sparking
  • Wafer Scratching
  • Part Replacement Time
  • Outgassing
  • Surface Resistance
  • Wafer Sticking
  • Reflectance
  • Air-Permeability
  • Lint adhesion
  • Misalignment
  • Clogging
  • Plasma Resistance
  • Yield
  • Contact Damage
  • Product Life
  • Dust Emissions
  • Defect Rate
  • Heat Resistance
  • Contamination
  • Abrasion
  • Functionality
  • Chemical Resistance
  • Corrosion Resistance
  • 薄ウェハ

Part Replacement Time

薄ウェハ

  • 準備中です
  • Metal Contamination Control
  • Wear Resistance Improvement
  • Improved Functionality
  • Wafer Scratch Prevention
  • Anti-Static Measures
  • Improved Heat Resistance
  • Portability
  • Warped Wafer Prevention
  • Sparking Prevention
  • Improved Chemical Resistance
  • Improved Productivity
  • Misalignment Prevention
  • Reduced Defect Rate
  • Improved Productivity(Improved Throughput)
  • Wear Resistance
  • Contact Damage Reduction
  • Yield Improvement
  • Man-Hour Reduction
  • Surface Resistance Control
  • Wear Prevention
  • Particle Control
  • Suction Mark Reduction
  • Outgassing Reduction
  • Deformation Reduction
  • Improved Plasma Resistance
  • Long Service Life
  • ワークの傷防止
  • Contamination Measures
  • Cost Reduction

Improved Functionality

Improved Productivity(Improved Throughput)

Man-Hour Reduction

Cost Reduction

  • Wafer Transfer End Effector / Handling Arm
  • Baking Setter
  • Porous Chuck
  • Alumina Cover
  • PAD
  • Other

Wafer Transfer End Effector / Handling Arm

CONTACT

The quotation and inquiries are available by the telephone /FAX or the mail .