試作品UniZac-Obon®の軽量化品のご紹介
試作品のオリジナルハンドUniZac-Obon®について、内部に空洞部を複数設けることで、約10 %の軽量化に成功しまし...
Our ceramics parts are used by device manufacturers and other customers in various industries.
Cost
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Particles
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Conductivity
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Suction Marks
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Static Electricity
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Warped Wafer
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Warped Wafer PreventionImproved Productivity(Improved Throughput)
Productivity (Throughput)
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Productivity(Improved Throughput)Improved Functionality
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Wafer Scratching
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
Part Replacement Time
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type: Alumina Cover
Proposed Effect: Man-Hour ReductionCost ReductionImproved Productivity
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Productivity(Improved Throughput)Improved Functionality
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Wafer Sticking
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
Air-Permeability
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
Misalignment
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Plasma Resistance
Yield
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Contact Damage
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Product Life
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Dust Emissions
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Heat Resistance
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Material change to Black Alumina pin
Product Type: Other
Proposed Effect: Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Abrasion
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Functionality
Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityPortability
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
薄ウェハ
Wear Resistance Improvement
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Material change to Black Alumina pin
Product Type: Other
Proposed Effect: Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Improved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityPortability
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Productivity(Improved Throughput)Improved Functionality
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Wafer Scratch Prevention
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
Anti-Static Measures
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Improved Heat Resistance
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Material change to Black Alumina pin
Product Type: Other
Proposed Effect: Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
Warped Wafer Prevention
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Warped Wafer PreventionImproved Productivity(Improved Throughput)
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Improved Productivity
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type: Alumina Cover
Proposed Effect: Man-Hour ReductionCost ReductionImproved Productivity
Misalignment Prevention
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Reduced Defect Rate
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
Proposal for ceramicization of masks
Product Type: Other
Proposed Effect: Deformation ReductionCost ReductionReduced Defect Rate
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Improved Productivity(Improved Throughput)
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Productivity(Improved Throughput)Improved Functionality
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Warped Wafer PreventionImproved Productivity(Improved Throughput)
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Contact Damage Reduction
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Yield Improvement
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal of a porous setter with low impact on the work piece and good air permeability
Product Type: Baking Setter
Proposed Effect: Contact Damage ReductionImproved FunctionalityReduced Defect RateYield Improvement
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Man-Hour Reduction
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type: Alumina Cover
Proposed Effect: Man-Hour ReductionCost ReductionImproved Productivity
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Surface Resistance Control
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Particle Control
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
Suction Mark Reduction
Proposal of End Effector / Handling Arm for warping and thin wafer transfer
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionSuction Mark ReductionYield ImprovementParticle Control
パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wafer Scratch PreventionSuction Mark Reduction
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Outgassing Reduction
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceAnti-Static MeasuresSurface Resistance ControlOutgassing Reduction
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Deformation Reduction
Proposal for ceramicization of masks
Product Type: Other
Proposed Effect: Deformation ReductionCost ReductionReduced Defect Rate
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
Improved Plasma Resistance
Long Service Life
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Contamination Measures
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contamination MeasuresAnti-Static MeasuresSparking PreventionReduced Defect Rate
Cost Reduction
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment
Product Type: Alumina Cover
Proposed Effect: Man-Hour ReductionCost ReductionImproved Productivity
Proposing solutions for resin products that are worn and troublesome by using ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Wear Resistance ImprovementImproved Productivity(Improved Throughput)Man-Hour ReductionCost Reduction
Proposal for ceramicization of masks
Product Type: Other
Proposed Effect: Deformation ReductionCost ReductionReduced Defect Rate
Suggestions for integration of suction End Effector / Handling Arm cavities
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat ResistanceMan-Hour ReductionLong Service LifeCost ReductionOutgassing Reduction
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
Wafer Transfer End Effector / Handling Arm
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contact Damage ReductionWear PreventionContamination Measures
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved Functionality
Proposal for a transport End Effector / Handling Arm that can suck warped wafers
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Warped Wafer PreventionMisalignment PreventionImproved FunctionalityYield Improvement
Proposal for a portable wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityPortability
Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved Productivity
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved FunctionalityAnti-Static MeasuresSurface Resistance Control
Proposal for assembly of the sensor to the wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Productivity(Improved Throughput)Improved Functionality
Porous Chuck
Proposal of double-sided suction Porous Chuck
Product Type: Porous Chuck
Proposed Effect: Improved Productivity(Improved Throughput)Man-Hour ReductionCost ReductionImproved Functionality
大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案
Product Type: Porous Chuck
Proposed Effect: Deformation ReductionImproved Productivity(Improved Throughput)Suction Mark Reductionワークの傷防止
PAD
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionWarped Wafer PreventionAnti-Static MeasuresReduced Defect Rate
Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Man-Hour ReductionCost ReductionImproved FunctionalityImproved ProductivityWear Resistance
Proposal of a End Effector / Handling Arm with PAD that can adsorb and transport warped wafers
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Warped Wafer PreventionImproved Productivity(Improved Throughput)
Proposing PAD surface-treatment to prevent problems with wafer sticking
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch PreventionMisalignment PreventionContact Damage ReductionYield Improvement
Other
Proposal of specially treated products that can prevent metal contamination
Product Type: Other
Proposed Effect: Improved Chemical ResistanceImproved Productivity(Improved Throughput)Man-Hour ReductionLong Service LifeMetal Contamination ControlParticle Control
Proposal for ceramicization of masks
Product Type: Other
Proposed Effect: Deformation ReductionCost ReductionReduced Defect Rate
Material change to Black Alumina pin
Product Type: Other
Proposed Effect: Wear Resistance ImprovementImproved Heat ResistanceImproved Plasma Resistance
We will solve your problems using our unique proprietary technology.
See examples of ceramic parts we haveprovided to device manufacturers and other customers invarious industries.
精密セラミックボール(炭化ケイ素SiC3N)
高耐熱性4~8インチウエハ吸着用 SiC搬送ハンド(UniZac-air®)
UniZac-air® (ユニザックエア) センサー溝付き空洞一体ハンド(12インチ用)
ケガキ線付き4~8インチウエハ吸着用I型ベルヌーイハンド(LeviZac®薄型)
反りウエハ対応搬送ハンド1点吸着仕様多孔質埋め込みハンド12インチ(UniZac-Pair)
12インチウエハ搬送用 トレイ式軽量化ハンド(UniZac-Obon®)
Φ200×t 0.5 SiCダミーウエハ(反り量0.5 mm)【常圧焼結品/多結晶体】
500角吸着用 大型多孔質チャック(多孔質AZP60、本体アルミ)
4~8インチ反りウエハ対応ロボット搬送ハンド(UniZac-air®)
Φ330アルミナ空洞一体プレート
試作品のオリジナルハンドUniZac-Obon®について、内部に空洞部を複数設けることで、約10 %の軽量化に成功しまし...
ウエハ保持部に段差を設けたことで、反りウエハを吸着させやすくした搬送ハンドです。詳細は以下をご覧ください。 ...
反ったウエハを搬送する際、カセットに接触し、ウエハが破損したことはありませんか。当社の UniZac-air®(1.2 ...
Frequently Asked Questions
Common questions from
the Ceramics Design Lab
Available Material / Size / Product
Please see our wide range of
services
Equipment owned
Our processing and
inspection facilities
Company profile
Ceramics Design Lab is
operated by Asuzac Co., Ltd.
The quotation and inquiries are available by the telephone /FAX or the mail .
FAX. +81-26-251-2160