For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck
made in Japan
＜Telephone quotations/inquiries＞
TEL+81-26-248-1626
Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)
＜Telephone quotations/inquiries＞
TEL. +81-26-248-1626Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
＜Estimates and inquiries by FAX＞
FAX. +81-26-251-2160
「Wafer transfer vacuum End Effector / Handling Arm」 list
- Latest Cases
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Material
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2024.03.11UniZac-air® (ユニザックエア) 両面吸着ハンド（12インチ用）
Industry： Semiconductor,Robots ・ Equipment
Material： High Purity Alumina
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2024.02.144～8インチウエハ吸着用 薄型1.2 mmロボット搬送ハンド（UniZac-air®）
Industry： Semiconductor,Robots ・ Equipment
Material： High Purity Alumina
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2023.12.284～6インチウエハ対応薄型ベルヌーイハンド（LeviZac®）静電気拡散アルミナコート
Industry： Semiconductor,Robots ・ Equipment
Material： High Purity Alumina
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2023.12.28
4～5インチウエハ対応薄型ベルヌーイハンド（LeviZac®）静電気拡散アルミナコート
Industry： Semiconductor,Robots ・ Equipment
Material： High Purity Alumina
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2023.12.25
12インチウエハ吸着用 ロボット搬送ハンド（PeriZac®）高温仕様
Industry： Semiconductor,Robots ・ Equipment,Optical equipment
Material： High Purity Alumina
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2023.10.17
4～8インチウエハ吸着用I型ベルヌーイハンド（LeviZac®薄型）
Industry： Semiconductor,Robots ・ Equipment,Optical equipment
Material： High Purity Alumina
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2023.10.12
反りウエハ対応搬送ハンド多孔質埋め込みハンド12インチ（UniZac-Pair）
Industry： Semiconductor,Robots ・ Equipment,Industrial machinery
Material： High Purity Alumina,Porous Ceramics
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2023.09.21
Porous embedded transfer End Effector / Handling Arm for 8-inch wafer suction with sensor groove (UniZac-Pair）
Industry： Robots ・ Equipment
Material： High Purity Alumina,Porous Ceramics
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2023.03.16I-Type Bernoulli Hand (LeviZac®) for 4 to 8 inch Wafer Suction
Industry： Semiconductor,Robots ・ Equipment,Optical equipment
Material： High Purity Alumina
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2022.11.30Transfer End Effector / Handling Arm for robots for cleaning equipment
Industry： Robots ・ Equipment
Material： High Purity Alumina
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2022.11.30Transfer End Effector / Handling Arm for Wafer Prober Equipment (Suction and Bernoulli Integrated Type)
Industry： Semiconductor
Material： High Purity Alumina
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2022.11.30Transfer hand for wafer prober equipment (suction/Bernoulli integrated type, thickness 2.4t)
Industry： Semiconductor
Material： High Purity Alumina
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Examples of VA / VE
proposals for design developers- ★NEW パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案
- Proposal for a transport End Effector / Handling Arm that can suck warped wafers
- Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
- Proposal of a porous setter with low impact on the work piece and good air permeability
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TEL. +81-26-248-1626
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