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ProblemsImpurities
Static Electricity
Sparking
Lint adhesion -
Proposed EffectContamination Measures
Anti-Static Measures
Sparking Prevention
Reduced Defect Rate -
Product TypeWafer Transfer End Effector / Handling Arm
Customer's concerns and problems / Before
Our proposals and improvement effects / After
In response, the Ceramics Design Laboratory proposed replacing with a wafer Transfer End Effector / Handling Arm that adds conductivity to alumina using our proprietary coating technology.
As a result, it led to countermeasures against static electricity and improved surface roughness, which made it difficult for impurities such as lint to adhere, thereby reducing the defect rate.
Point of the proposed example / Point
The point of this case is that the amount of impurities deposited has been greatly reduced by countermeasures against static electricity.
Sparks caused by static electricity lead to the adhesion of impurities, resulting in problems such as scratches and warping of the wafer.
Countermeasures against this problem include the application of a conductive coating, as well as the use of a conductive ceramics material that is conductive itself and does not require a coating.
The Fine Ceramics Division of ASUZAC Corporation, which operates the Ceramics Design Laboratory, handles everything from material development and preparation to design and manufacture, as well as surface treatment, inspection, and cleaning.
We can also offer our own coating-technology for adding functionality to ceramics materials, as well as the selection of materials such as ceramics materials with high heat resistance and conductivity, and high-purity Alumina and SiC that are highly pure and prevent contamination.
If you have trouble with the existing wafer Transfer End Effector / Handling Arm, please feel free to contact us.
Integrated response from processing to development of ceramic materials !
Please feel free to contact us !
Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)
When cleaning wafer Transfer End Effector / Handling Arm at the customer’s side, lint from the rag adhered to the surface, causing a drop in yield.