Porous Alumina Chuck for 6-inch wafer adsorption (Body A5052)

This is a porous chuck used to adsorb wafers, filters, and jigs. We used our machining center to perform machining with JIS intermediate dimensional accuracy. The amount of popping out of the porous part is 1mm. Suction port (Rc1/8) is provided on the side of the main unit. The porous and body are bonded with an epoxy-based adhesive. Asuzac Corporation, which operates the Ceramics Design Lab, offers a full range of services from the preparation, granulation, and molding of porous ceramic raw materials to green processing (raw processing), firing, secondary processing, inspection, and cleaning. In addition to suction chucks such as this product, we have a large number of experience in manufacturing ceramics products such as wafer Transfer End Effector / Handling Arm, wafer trays, and sintering jigs. For the design and manufacture of ceramics products for semiconductors and electronic components, leave it to Asuzac.