Example of custom-made

CERAMICS DESIGN LAB > Wafer tray made of Alumina for dry etching (through hole type)

Wafer tray made of Alumina for dry etching (through hole type)

Wafer tray made of Alumina for dry etching (through hole type)|Ceramics Design Lab
Wafer tray made of Alumina for dry etching (through hole type)|Ceramics Design Lab
Wafer tray made of Alumina for dry etching (through hole type)|Ceramics Design Lab
Product Name Wafer tray made of Alumina for dry etching (through hole type)
Industry Semiconductor
Product Type Wafer Tray
Material High Purity Alumina
Size Dimensions Φ340 mm, Thickness 2.5 mm
This is an Alumina tray with a through-hole shape that holds a 4-inch wafer. Seven wafers with oriflers can be mounted on Φ340 x 2.5t. This is a tray that can receive wafers at about the outer peripheral 0.5mm of the wafer. We used our machining center to make a U-shaped notch with a width of 2.4 x a length of 3.2. Finished to a flatness of 0.05. We perform a full range of operations, from mixing, granulation, molding, raw processing, firing, secondary processing, and inspection of Alumina materials. Asuzac Corporation, which operates the Ceramics Design Lab, offers a full range of services from Alumina raw material preparation, granulation, and molding to green processing (raw processing), firing, secondary processing, inspection, and cleaning. In addition to wafer trays such as this product, we have a large number of experience in manufacturing ceramics products such as wafer Transfer End Effector / Handling Arm (including those developed in-house), suction chucks, and setters for sintering. For the design and manufacture of ceramics products for semiconductors and electronic components, leave it to Asuzac.

Integrated response from processing to development of ceramic materials !

Please feel free to contact us !

TEL +81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

List of custom production examples

  • Latest Cases
  • Search by
    Industry
  • Search by
    Product Type
  • Search by
    Material
  • バックグラインド工程
  • Semiconductor
  • アニール工程
  • Robots ・ Equipment
  • エピタキシャル工程
  • Optical equipment
  • CVD工程
  • Chemistry・Material
  • Ceramics firing jig
  • 洗浄工程
  • Industrial machinery
  • Film
  • University・Research institute
  • Other
  • ボンディング工程
  • 検査工程
  • リソグラフィ工程
  • Bonding process
  • Inspection process
  • Lithography process

Semiconductor

Robots ・ Equipment

Optical equipment

Industrial machinery

  • セラミックステージ
  • Wafer transfer vacuum End Effector / Handling Arm
  • セラミックガイド
  • Bernoulli End Effector / Handling Arm
  • ウエハ搬送ハンド(ロボットトレイ式ハンド)
  • Wafer Tray
  • Firing jig
  • filter
  • Other
  • Porous Chuck
  • ウエハ
  • XYステージ部品
  • 検査治具
  • セラミックスプレート
  • Ceramics plate
  • Inspection jig
  • XY stage parts
  • ピンチャック

Wafer transfer vacuum End Effector / Handling Arm

Bernoulli End Effector / Handling Arm

XYステージ部品

  • 準備中です

検査治具

  • 準備中です
  • Ultra High Purity Alumina (4N)
  • Static Electricity Diffusion Alumina
  • High Purity Silicon Carbide
  • High Purity Alumina
  • SiC(Silicon Carbide)
  • Porous Ceramics
  • Conductive Ceramics
  • アルシーマL
  • Alsima
  • ブラックアルミナ

High Purity Alumina

CONTACT

The quotation and inquiries are available by the telephone /FAX or the mail .