Product Name
|
Robot Transfer End Effector / Handling Arm for 12-inch Wafer Suction (UniZac-air®) |
Industry
|
Semiconductor
|
Product Type
|
Wafer transfer vacuum End Effector / Handling Arm
|
Material
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High Purity Alumina
|
Size
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12-inch End Effector / Handling Arm External 330×104 mm, Thickness 3.5 mm |
This is a suction-type transfer End Effector / Handling Arm for 12 inches.
We used our machining center to finish the surface roughness of the wafer holding section to Ra0.8.
Three suction holes of counter bores that lead to the cavities have Φ4 depth of 1.4.
For the suction port, one counter bore is provided leading to the Φ5 cavity.
Asuzac Corporation, which operates the Ceramics Design Lab, offers a full range of services from alumina raw material preparation, granulation, and molding to green processing (raw processing), firing, secondary processing, inspection, and cleaning. In addition to wafer Transfer End Effector / Handling Arm such as this product, we have a large number of experience in manufacturing wafer trays, suction chucks, setters for sintering, and other ceramics products.
For the design and manufacture of ceramics products for semiconductors and electronic components, leave it to Asuzac.