Product Name
|
Robot Transfer End Effector / Handling Arm for 12-inch Wafer Suction (PeriZac®) |
Industry
|
Semiconductor Optical equipment
|
Product Type
|
Wafer transfer vacuum End Effector / Handling Arm
|
Material
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High Purity Alumina
|
Size
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12-inch End Effector / Handling Arm External 348×100 mm, Thickness 2.3 mm |
This is a End Effector / Handling Arm that adsorbs 12 inch wafers.
We used our machining center to machine four suction holes (width-width 1mm) for sucking wafers.
The guides (Teflon tape) that match the shape of the four suction holes are processed and affixed to the main body.
The vacuum port has one hole diameter Φ6 and end face pitched 20mm.
In addition, the mounting hole is a through hole of 4×Φ5.
Asuzac Corporation, which operates the Ceramics Design Lab, offers a full range of services from alumina raw material preparation, granulation, and molding to green processing (raw processing), firing, secondary processing, inspection, and cleaning. In addition to wafer Transfer End Effector / Handling Arm such as this product, we have a large number of experience in manufacturing wafer trays, suction chucks, setters for sintering, and other ceramics products.
For the design and manufacture of ceramics products for semiconductors and electronic components, leave it to Asuzac.