Example of VA / VE proposals

Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment

Product Type： Alumina Cover

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Productivity

Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD

Product Type： Wafer Transfer End Effector / Handling ArmPAD

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Functionality,Improved Productivity,Wear Resistance

Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Functionality,Improved Productivity

Proposal of specially treated products that can prevent metal contamination

Product Type： Other

Proposed Effect： Improved Chemical Resistance,Improved Productivity(Improved Throughput),Man-Hour Reduction,Long Service Life,Metal Contamination Control,Particle Control

Proposal of double-sided suction Porous Chuck

Product Type： Porous Chuck

Proposed Effect： Improved Productivity(Improved Throughput),Man-Hour Reduction,Cost Reduction,Improved Functionality

Suggestions for integration of suction End Effector / Handling Arm cavities

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Improved Heat Resistance,Man-Hour Reduction,Long Service Life,Cost Reduction,Outgassing Reduction

Proposing solutions for resin products that are worn and troublesome by using ceramics

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Wear Resistance Improvement,Improved Productivity(Improved Throughput),Man-Hour Reduction,Cost Reduction