Example of VA / VE proposals

大型偏光フィルムの吸着が可能な500角の大型多孔質チャックのご提案

Product Type： Porous Chuck

Proposed Effect： Deformation Reduction,Improved Productivity(Improved Throughput),Suction Mark Reduction,ワークの傷防止

パワー半導体向け薄反りウエハの保持・吸着が可能な多孔質埋め込みハンドのご提案

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Wafer Scratch Prevention,Suction Mark Reduction

Proposal for a transport End Effector / Handling Arm that can suck warped wafers

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Warped Wafer Prevention,Misalignment Prevention,Improved Functionality

Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Contamination Measures,Anti-Static Measures,Sparking Prevention,Reduced Defect Rate

Proposal of a porous setter with low impact on the work piece and good air permeability

Product Type： Baking Setter

Proposed Effect： Contact Damage Reduction,Improved Functionality,Reduced Defect Rate,Yield Improvement

Alumina-protective cover reduces the frequency of replacement of heater components for CVD equipment

Product Type： Alumina Cover

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Productivity

Cost reduction by remodeling the wafer Transfer End Effector / Handling Arm -holding section to a PAD

Product Type： Wafer Transfer End Effector / Handling ArmPAD

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Functionality,Improved Productivity,Wear Resistance

Proposal for a Transfer End Effector / Handling Arm that can use one wafer for adsorption and floating

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Man-Hour Reduction,Cost Reduction,Improved Functionality,Improved Productivity

Proposal for a portable wafer Transfer End Effector / Handling Arm

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Improved Functionality,Portability

Proposal of specially treated products that can prevent metal contamination

Product Type： Other

Proposed Effect： Improved Chemical Resistance,Improved Productivity(Improved Throughput),Man-Hour Reduction,Long Service Life,Metal Contamination Control,Particle Control

Proposal for a transport End Effector / Handling Arm that can suck warped wafers

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Warped Wafer Prevention,Misalignment Prevention,Improved Functionality,Yield Improvement

Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Contact Damage Reduction,Wear Prevention,Contamination Measures