For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck
made in Japan
<Telephone quotations/inquiries>
TEL+81-26-248-1626
Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)
Reduction of defect rate of electrostatic diffusion End Effector / Handling Arm by changing coating
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Contamination Measures,Anti-Static Measures,Sparking Prevention,Reduced Defect Rate
Proposal of a wafer Transfer End Effector / Handling Arm with superior electrostatic diffusion effect even at high temperatures
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Functionality,Anti-Static Measures,Surface Resistance Control
Measures against static electricity and outgas in wafer Transfer End Effector / Handling Arm
Product Type: Wafer Transfer End Effector / Handling Arm
Proposed Effect: Improved Heat Resistance,Anti-Static Measures,Surface Resistance Control,Outgassing Reduction
Proposing PAD to prevent static electricity
Product Type: Wafer Transfer End Effector / Handling ArmPAD
Proposed Effect: Wafer Scratch Prevention,Warped Wafer Prevention,Anti-Static Measures,Reduced Defect Rate
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operated by Asuzac Co., Ltd.
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FAX. +81-26-251-2160