| Product Name | LeviZac® Floating standard End Effector (Bernoulli method) |
|---|---|
| Classification | Floating standard End Effector (Bernoulli method) |
| Use | For wafer transport (atmospheric use) |
| Material | 高純度アルミナ |
| Feature |
Capable of handling warped wafers Capable of handling thin wafers Achieves non-contact except for the outer guide |
| Size |
■For wafer size 300mm 350 × 220 × 2.5 mm ■For wafer size 200mm 272 × 100 × 2.5 mm |
Features Of This Product
Features of "LeviZac® Floating standard End Effector (Bernoulli method)"
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・Thin wafers can be handled.
・Able to transfer warped wafers.
・Non-contact is realized except for the guide on the outer circumference
・Particle generation due to contact with the guide is suppressed.
・Cavity integration technology improves durability.
Shape of "LeviZac® Floating standard End Effector (Bernoulli method)"
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Figure 1 shows the external shape of the LeviZac®.It has four jet holes and guides.
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Figure 2 is a cross-sectional view of LeviZac®.The wafer can be held at 3 mm around the wafer periphery.
Examples and achievements of "LeviZac® Floating standard End Effector (Bernoulli method)"
Download Drawings of"LeviZac® Floating standard End Effector (Bernoulli method)"
LeviZac8-inch
（LeviZac8-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
LeviZac12-inch
（LeviZac12-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference
Video of "LeviZac® Floating standard End Effector (Bernoulli method)"
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Bernoulli Hand (LeviZac) 8-inch wafer holding video in water
This is a video of an 8-inch Bernoulli End Effector / Handling Arm (LeviZac) holding a wafer in water. The wafer is held by spewing water from four spouting holes. The wafer is held by four guides with an outer circumference of about 3 mm. It can be used underwater. -
LeviZac 12-inch transport video
This is a 12-inch Bernoulli End Effector / Handling Arm (LeviZac) wafer transfer video. The wafer is held by blowing air from four blowout holes. The wafer is held by four guides with an outer circumference of about 3 mm. The LeviZac can be rotated to hold the wafer. Wafers can be transported while sucking them from above.
Frequently Asked Questions on "LeviZac® Floating standard End Effector (Bernoulli method)"
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Since the heat resistance temperature of the guide is 100°C, it is difficult to use the guide at higher temperatures.For use in high temperature environments, we will propose a shape in which the guide material is alumina.Please contact us for details.
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Fabrication is possible: Y-shaped LeviZacs can be fabricated for 4inch, 5inch, and 6inch wafers.The LeviZac for 4-inch wafers can hold 5- to 8-inch wafers.I-shape LeviZac is also available.
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LeviZac® holds the workpiece in a horizontal position with four guiding points.The top of the workpiece is attracted from above, held in place, and then transferred.
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The LeviZac® can hold wafers by pouring water or liquid into an empty channel and ejecting it through a jet hole. For more information, please see this video. >>LeviZacunderwater wafer reention video
