Example of VA / VE proposals

Proposal of a porous setter with low impact on the work piece and good air permeability

Product Type： Baking Setter

Proposed Effect： Contact Damage Reduction,Improved Functionality,Reduced Defect Rate,Yield Improvement

Reduction of contact damage by changing the material of the wafer Transfer End Effector / Handling Arm from metal to conductive ceramics

Product Type： Wafer Transfer End Effector / Handling Arm

Proposed Effect： Contact Damage Reduction,Wear Prevention,Contamination Measures

Proposing PAD surface-treatment to prevent problems with wafer sticking

Product Type： Wafer Transfer End Effector / Handling ArmPAD

Proposed Effect： Wafer Scratch Prevention,Misalignment Prevention,Contact Damage Reduction,Yield Improvement