For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck

made in Japan

＜Telephone quotations/inquiries＞

TEL+81-26-248-1626

Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)

＜Telephone quotations/inquiries＞

TEL. +81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

＜Estimates and inquiries by FAX＞

FAX. +81-26-251-2160

Technical Movie Webiner

CERAMICS DESIGN LAB > Technical Movie Webiner

The video is presented by professionals in the field of ceramics materials development, design and manufacturing!

  • トレイ式ハンド（UniZac-Obon®）12インチの搬送動画

    12インチ トレイ式ハンド（UniZac-Obon®）のウエハ搬送動画です。ウエハ底面の外周と側面の一部でウエハを保持し、搬送しています。金属のハンドに比べて、たわみが少ないことが特徴です。大気と真空の両方の環境で使用が可能です。

    >>トレイ式ハンド（UniZac-Obon®）のページはこちら

  • 吸着ハンド（UniZac-air®）12インチの搬送動画

    12インチ 吸着ハンド（UniZac-air®）のウエハ搬送動画です。3箇所の吸着穴でウエハを吸着し、搬送しています。空洞一体技術を使用して製作しているため、接着剤を使用していません。耐久性が高く、高温環境で使用ができます。有機系のアウトガスが発生するリスクがありません。

    >>吸着ハンド（UniZac-air®）のページはこちら

  • Adsorption test of Porous Chuck (AZPS40)

    This is an adsorption video of a porous chuck (AZPS40). AZPS40 excels in adsorption of thin films. In addition, it has excellent thermal shock and chemical resistance. It is conductive enough to eliminate static electricity. Partial adsorption is possible.

    >>Click here for the page on Porous Chuck

  • LeviZac 8-inch underwater wafer retention

    This is a video of an 8-inch Bernoulli End Effector / Handling Arm (LeviZac) holding a wafer in water. The wafer is held by spewing water from four spouting holes. The wafer is held by four guides with an outer circumference of about 3 mm. It can be used underwater.

    >>Click here for the page on LeviZac

  • Porous ceramics Non-contact levitation stage

    This is a video in which a Φ300 dummy wafer (100g) is floated by a Porous Chuck. By blowing air from the entire surface of the porous ceramics, the conveyed product can be floated without contact. It is less likely to be scratched by contact.

    >>Click here for the page on Porous Chuck

  • LeviZac 12-inch transport video

    This is a video of an 8-inch Bernoulli End Effector / Handling Arm (LeviZac) holding a wafer in water. The wafer is held by spewing water from four spouting holes. The wafer is held by four guides with an outer circumference of about 3 mm. It can be used underwater.

    >>Click here for the page on LeviZac

  • Adsorption test using a large Porous Chuck

    This is an adsorption video of a large Porous Chuck. The large adsorption area allows large workpieces to be adsorbed. The porous ceramics AZP60 is capable of partial adsorption. Suitable for adsorption of thin films.

    >>Click here for the page on Porous Chuck

  • For high temperature, strong acid, strong alkali atmospheres Porous ceramics bubbler

    This is a bubbler video of porous ceramics. It can be used mainly underwater. Micron-sized pores generate fine bubbles.
    ※The size of the bubbles varies depending on the condition and atmosphere of gases, liquids, etc.

    >>Click here for the page on porous ceramics

  • Porous Ceramics Bubbler

    This is a bubbler video of porous ceramics AZPS40. It can be used mainly underwater. Micron-sized pores generate fine bubbles.
    ※The size of the bubbles varies depending on the condition and atmosphere of gases, liquids, etc.

    >>Click here for the page on porous ceramics

  • Porous ceramics Multidirectional film adsorption tweezers

    This is a video of the suction tweezers of a film-like workpiece. By adsorbing with porous ceramics, wrinkles and adsorption marks are less likely to form on the thin film.

    >>Click here for the page on porous ceramics

  • Ceramics Design Lab’s proprietary adsorption test of thin Porous Chuck

    This is an adsorption video of a thin porous chuck with an outer diameter of Φ32 and a thickness of 2 mm. A thin film can be adsorbed. Partial adsorption is possible.

    >>Click here for the page on Porous Chuck

  • Newly developed collet with increased adsorption power

    This is a video of a porous ceramic scollet with an adsorption diameter of Φ2. It can adsorb heavy workpieces.
    (Board size: □10 mm, 280mg)
    It can be tested in a real environment. Please feel free to contact us.

    >>Click here for the page on Porous Chuck

  • 両面吸着多孔質チャックの吸着テスト動画

    両面吸着多孔質チャックの吸着テスト動画です。名刺やカプトンフィルムを多孔質の両面で同時に吸着可能です。多孔質は、AZP60とAZPS40でなので、部分吸着が可能です。両面吸着ができるので、マシニングのワークセットの際の固定用治具として利用が可能です。段取り替えが不要のため、工数削減やコストダウンにつながります。

    >>両面吸着多孔質チャックのページはこちら

CONTACT

The quotation and inquiries are available by the telephone /FAX or the mail .

TEL. +81-26-248-1626

FAX. +81-26-251-2160