For fine ceramic products such as Transfer End Effector / Handling Arm and Porous Chuck

made in Japan

＜Telephone quotations/inquiries＞

TEL+81-26-248-1626

Business hours: 9:00-17:00
(closed on Saturdays, Sundays and Holidays)

＜Telephone quotations/inquiries＞

TEL. +81-26-248-1626

Business hours: 9:00-17:00 (closed on Saturdays, Sundays and Holidays)

＜Estimates and inquiries by FAX＞

FAX. +81-26-251-2160

DRAWING DOWNLOAD

You can download the desired drawing below.

LeviZac12-inch

（LeviZac12-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
LeviZac8-inch

（LeviZac8-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
I Type LeviZac4-inch

（I Type LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
8 guides allow wafer retention

2D drawing 3D drawing
Thin-LeviZac4-inch

（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
Thin-LeviZac4-inch

（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
Thin-LeviZac4-inch

（Thin-LeviZac4-inch）
- Warped wafer
- Thin wafer
- Flotation type
- Bernoulli equation
- Heat resistance
- For Atmospheric
- Spouting hole
- Guide
- Integrated cavity
Can be transported to narrow cassette widths

2D drawing 3D drawing
PeriZac12-inch

（PeriZac12-inch）
- Particle suppression
- Improved durability
- Adsorption type
- Deflection
- Metal-free
- For Atmospheric
- Thinner
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
PeriZac8-inch

（PeriZac8-inch）
- Particle suppression
- Improved durability
- Adsorption type
- Deflection
- Metal-free
- For Atmospheric
- Thinner
- Guide
- Integrated cavity
Capable of holding wafers within 3mm of wafer circumference

2D drawing 3D drawing
UniZac-air12-inch

（UniZac-air12-inch）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
Effective for organic-based outgas control

2D drawing 3D drawing
UniZac-air8-inch

（UniZac-air8-inch）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
Effective for organic-based outgas control

2D drawing 3D drawing
UniZac-air8-inch(1mm thickness type)

（UniZac-air8-inch(1mm thickness type)）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
1 mm thick cavity integrated transfer End Effector

2D drawing 3D drawing
UniZac-air8″(ASiC)(1.9mm thickness type)(ASUZAC LOGO)

（UniZac-air8"）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
1.9mm thick SiC cavity integrated transfer End Effector

2D drawing 3D drawing
UniZac-air8″(ASiC)(1.9mm thickness type)(with mounting holes)

（UniZac-air8"）
- Adhesive-free
- Improved durability
- Adsorption type
- Heat resistance
- Metal-free
- For Atmospheric
- Thinner
- High strength
- Integrated cavity
1.9mm thick SiC cavity integrated transfer End Effector

2D drawing 3D drawing
UniZac-Obon12-inch

（UniZac-Obon12-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness

2D drawing 3D drawing
UniZac-Obon8-inch

（UniZac-Obon8-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness

2D drawing 3D drawing
UniZac-Obon4-inch

（UniZac-Obon4-inch）
- Short delivery time
- Improved durability
- Tray type
- Heat resistance
- For Atmospheric
- For vacuum
- Deflection
- High strength
- Light weight
Reduced weight and thickness

2D drawing 3D drawing
Porous embedded hand12-inch

（Porous embedded hand12-inch）
- Warped wafer
- Thin wafer
- Deformation prevention
- Adsorption scar suppression
- Adsorption type
- Porousbuilt-in
- For Atmospheric
- Breathability
- Responsiveness
Capable of retaining lightly warped wafers

2D drawing 3D drawing
Porous embedded hand8-inch

（Porous embedded hand8-inch）
- Warped wafer
- Thin wafer
- Deformation prevention
- Adsorption scar suppression
- Adsorption type
- Porousbuilt-in
- For Atmospheric
- Breathability
- Responsiveness
Capable of retaining lightly warped wafers

2D drawing 3D drawing