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Porous ceramics Non-contact levitation stage

2022.11.29

This is a video in which a Φ300 dummy wafer (100g) is floated by a Porous Chuck. By blowing air from the entire surface of the porous ceramics, the conveyed product can be floated without contact. It is less likely to be scratched by contact.

>>Click here for the page on Porous Chuck

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